Wafer-Scale Integration of Single Layer Graphene Electro-Absorption Modulators in a 300 mm CMOS Pilot Line

Wu, Cheng-HanCheng-HanWuBrems, StevenStevenBremsYudistira, DiditDiditYudistiraCott, DaireDaireCottMilenin, AlexeyAlexeyMileninVandersmissen, KevinKevinVandersmissenMaestre, ArantxaArantxaMaestreCenteno, AlbaAlbaCentenoZurutuza, AmaiaAmaiaZurutuzaVan Campenhout, JorisJorisVan CampenhoutHuyghebaert, CedricCedricHuyghebaertVan Thourhout, DriesDriesVan ThourhoutPantouvaki, MariannaMariannaPantouvaki2023-11-222023-04-222023-11-2220231863-8880WOS:000961844400001https://imec-publications.be/handle/20.500.12860/41474Wafer-Scale Integration of Single Layer Graphene Electro-Absorption Modulators in a 300 mm CMOS Pilot LineJournal article10.1002/lpor.202200789WOS:000961844400001DEPOSITIONPHOTONICSPHOTODETECTORMONOLAYERCRYSTALSGROWTHGUIDE