Lisoni, JuditJuditLisoniArreghini, AntonioAntonioArreghiniCongedo, GabrieleGabrieleCongedoToledano Luque, MariaMariaToledano LuqueToqué-Trésonne, InèsInèsToqué-TrésonneHuet, KarimKarimHuetCapogreco, ElenaElenaCapogrecoLiu, LifangLifangLiuTan, Chi LimChi LimTanDegraeve, RobinRobinDegraeveVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24147Laser thermal anneal of polysilicon channel to boost 3D memory performanceProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6894346&contentType=Conference+Publications