Modeling and simulation of a MEMS thermal actuator with polysilicon heater

Dellaert, DriesDriesDellaertDoutreloigne, JanJanDoutreloigne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23744Modeling and simulation of a MEMS thermal actuator with polysilicon heaterProceedings paperhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6813800&tag=1