Extreme scaled gate dielectrics by using ALD Hf-based composite materials

Pierreux, DieterDieterPierreuxMachkaoutsan, VladimirVladimirMachkaoutsanTois, E.E.ToisSwerts, JohanJohanSwertsSchram, TomTomSchramAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtTseng, JoshuaJoshuaTsengRagnarsson, Lars-AkeLars-AkeRagnarssonMaes, JanJanMaes2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16019Extreme scaled gate dielectrics by using ALD Hf-based composite materialsMeeting abstract