Alternative patterning techniques enabling fine pitch interconnection on topography surfaces

Iker, FrancoisFrancoisIkerFunaya, TakuoTakuoFunayaJamieson, GeraldineGeraldineJamiesonBeyne, EricEricBeyne2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17303Alternative patterning techniques enabling fine pitch interconnection on topography surfacesProceedings paper