Veloso, AnabelaAnabelaVelosoHoffmann, ThomasThomasHoffmannLauwers, AnneAnneLauwersYu, HongYuHongYuYuSeveri, SimoneSimoneSeveriAugendre, EmmanuelEmmanuelAugendreKubicek, StefanStefanKubicekVerheyen, PeterPeterVerheyenCollaert, NadineNadineCollaertAbsil, PhilippePhilippeAbsilJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13155Advanced CMOS device technologies for 45nm node and belowJournal article