Kuppuswamy, Vijaya-Kumar MurugesanVijaya-Kumar MurugesanKuppuswamyConstantoudis, VassiliosVassiliosConstantoudisGogolides, EvangelosEvangelosGogolidesVaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheid2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20968Contact edge roughness and CD uniformity in EUV: effect of photo acid generator and sensitizerProceedings paper