Backside-illuminated image sensors: optimizing manufacturing for a sensitivity payoff

Provoost, JanJanProvoostDe Moor, PietPietDe Moor2021-10-192021-10-192011-11https://imec-publications.be/handle/20.500.12860/19621Backside-illuminated image sensors: optimizing manufacturing for a sensitivity payoffJournal articlehttp://www.electroiq.com/articles/ap/2011/11/backside-illuminated-image-sensors-optimizing-manufacturing-by-imec.html