Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering

Ferain, IsabellaIsabellaFerainDuffy, RayRayDuffyCollaert, NadineNadineCollaertVan Dal, MarkMarkVan DalPawlak, BartekBartekPawlakO'Sullivan, BarryBarryO'SullivanWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersConard, ThierryThierryConardPopovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtKaiser, M.M.KaiserWeemaes, R.R.WeemaesSwerts, JohanJohanSwertsJurczak, GosiaGosiaJurczakLander, RobRobLanderDe Meyer, KristinKristinDe Meyer2021-10-172021-10-1720090038-1101https://imec-publications.be/handle/20.500.12860/15300Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineeringJournal article