Das, SayantanSayantanDasSah, KaushikKaushikSahFallica, RobertoRobertoFallicaChen, ZhijinZhijinChenHalder, SandipSandipHalderCross, AndrewAndrewCrossDe Simone, DaniloDaniloDe SimoneTreska, FergoFergoTreskaLeray, PhilippePhilippeLerayKim, Ryan Ryoung hanRyan Ryoung hanKimMaguire, EthanEthanMaguireWei, Chih-, IChih-, IWeiFenger, GermainGermainFengerLafferty, NealNealLaffertyLee, JeonghoonJeonghoonLee2023-06-202022-09-082023-06-202022978-1-5106-4985-90277-786XWOS:000844546500002https://imec-publications.be/handle/20.500.12860/40373EUV based multi-patterning schemes for advanced DRAM nodesProceedings paper10.1117/12.2615644978-1-5106-4986-6WOS:000844546500002