De Moor, PietPietDe MoorBelmans, WouterWouterBelmansVerbist, AgnesAgnesVerbistBaert, KrisKrisBaert2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3363Low temperature radiation detection using micromachined microcalorimetersProceedings paper