Study of capping layer impact on reflectivity loss by carbon deposition

Jonckheere, RikRikJonckheerePollentier, IvanIvanPollentierLorusso, GianGianLorussoGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonse2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12371Study of capping layer impact on reflectivity loss by carbon depositionOral presentation