Ronse, KurtKurtRonse2021-10-192021-10-1920110038-111Xhttps://imec-publications.be/handle/20.500.12860/19704The future of lithographyJournal articlehttp://www.electroiq.com/index/display/semiconductors-article-display/7921500372/articles/solid-state-technology/volume-54/issue