Kenis, KarineKarineKenisMertens, PaulPaulMertensAltamirano Sanchez, EfrainEfrainAltamirano SanchezVan Ongeval, JoostJoostVan OngevalDe Vita, MarieMarieDe Vita2025-02-102023-09-042025-02-102023-081662-9779https://imec-publications.be/handle/20.500.12860/42465Monitoring of Trace Molecular Impurities in Clean-Room AirProceedings paper