Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization

Carbonell, LaureLaureCarbonellVereecke, GuyGuyVereeckeVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaexMertens, PaulPaulMertens2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7276Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionizationProceedings paper