Schulze, AndreasAndreasSchulzeStrakos, LiborLiborStrakosVystavel, TomasTomasVystavelLoo, RogerRogerLooPacco, AntoineAntoinePaccoCollaert, NadineNadineCollaertVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-262021-10-2620182040-3364https://imec-publications.be/handle/20.500.12860/31749Non-destructive characterization of extended crystalline defects in confined semiconductor device structuresJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2018/nr/c8nr00186c#!divAbstract