Gonzalez, M.B.M.B.GonzalezSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerWang, G.G.WangLoo, RogerRogerLooClaeys, CorCorClaeys2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/23865Defect assessment and leakage control in Ge junctionsJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171400015X