Zhao, LarryLarryZhaoVolders, HennyHennyVoldersBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokeiPantouvaki, MariannaMariannaPantouvakiWilson, ChrisChrisWilsonVan Besien, ElsElsVan BesienBeyer, GeraldGeraldBeyerClaeys, CorCorClaeys2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/20224Study of metal barrier deposition-induced damage to porous low-k materialsJournal article