Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication

Doise, JanJanDoiseChan, BTBTChanHori, MasafumiMasafumiHoriGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26569Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplicationProceedings paper