Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Lauwers, A.A.LauwersBesser, PaulPaulBesserGutt, T.T.GuttSatta, AlessandraAlessandraSattade Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsayRoelandts, NicoNicoRoelandtsLoosen, FredFredLoosenJin, S.S.JinBender, HugoHugoBenderStucchi, MicheleMicheleStucchiVrancken, EviEviVranckenDeweerdt, BrunoBrunoDeweerdtMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4524Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologiesJournal article