Wu, Ming FangMing FangWuDe Wachter, JoJoDe WachterVan Bavel, MiekeMiekeVan BavelMoons, RafRafMoonsVantomme, AndreAndreVantommePattyn, HugoHugoPattynLangouche, G.G.LangoucheBender, HugoHugoBenderVanhellemont, JanJanVanhellemontTemst, K.K.TemstBruynseraede, Y.Y.Bruynseraede2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1031Structural characterization of ion-beam synthesized NiSi2 layersJournal article