Hauptmann, MarcMarcHauptmannBrems, StevenStevenBremsCamerotto, ElisabethElisabethCamerottoZijlstra, AaldertAaldertZijlstraDoumen, GeertGeertDoumenBearda, TwanTwanBeardaMertens, PaulPaulMertensLauriks, WalterWalterLauriks2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15446Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaningMeeting abstract