Sygellou, L.L.SygellouTielens, HildeHildeTielensAdelmann, ChristophChristophAdelmannLadas, SpyrosSpyrosLadas2021-10-202021-10-2020120167-9317https://imec-publications.be/handle/20.500.12860/21576An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacksJournal article