Montero Alvarez, DanielDanielMontero AlvarezVega Gonzalez, VictorVictorVega GonzalezFeurprier, YannickYannickFeurprierVarela Pedreira, OlallaOlallaVarela PedreiraOikawa, NoriakiNoriakiOikawaMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisBatuk, DmitryDmitryBatukPuliyalil, HarinarayananHarinarayananPuliyalilVersluijs, JankoJankoVersluijsDe Coster, HanneHanneDe CosterBazzazian, NinaNinaBazzazianJourdan, NicolasNicolasJourdanKumar, KaushikKaushikKumarLazzarino, FredericFredericLazzarinoMurdoch, GayleGayleMurdochPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2024-04-092022-11-232024-04-092022-06-29https://imec-publications.be/handle/20.500.12860/40771Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and belowProceedings paper10.1109/IITC52079.2022.9881321Applied physicshigh-aspect ratio viasuperviaBEOL interconnect3nm nodescaling booster