Extending logic metal printing with sub-resolution grating in high and hyper NA EUV lithography

Lee, InhwanInhwanLeeFranke, Joern-HolgerJoern-HolgerFrankePhilipsen, VickyVickyPhilipsenRonse, KurtKurtRonseDe Gendt, StefanStefanDe GendtHendrickx, EricEricHendrickx2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200026https://imec-publications.be/handle/20.500.12860/45992Extending logic metal printing with sub-resolution grating in high and hyper NA EUV lithographyProceedings paper10.1117/12.3051144978-1-5106-8635-9WOS:001517286200026