Zhao, Q.T.Q.T.ZhaoBuca, D.D.BucaLenk, S.S.LenkLoo, RogerRogerLooCaymax, MattyMattyCaymaxMantl, S.S.Mantl2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9981Formation of ternary Ni-silicide on relaxed and strained SiGe layersJournal article