Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

Everaert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelPap, AronAronPapMeszaros, AlbertAlbertMeszarosDekoster, JohanJohanDekosterPavelka, TiborTiborPavelka2021-10-192021-10-1920111071-1023https://imec-publications.be/handle/20.500.12860/18890Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectricJournal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JVTBD900002900000101AB05000001&idtype=cvips&doi=10.1116/1.