Routes towards large area, low pressure nanodiamond growth via pulsed microwave linear antenna plasma chemistry

Liehr, MichaelMichaelLiehrFendrych, FrantisekFrantisekFendrychTaylor, AndrewAndrewTaylorNesladek, MilosMilosNesladek2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19296Routes towards large area, low pressure nanodiamond growth via pulsed microwave linear antenna plasma chemistryProceedings paper