Analytical model and Monte Carlo simulations for phosphorus implantation in germanium including ion channeling

Hellings, GeertGeertHellingsEneman, GeertGeertEnemanMeuris, MarcMarcMeurisDe Meyer, KristinKristinDe Meyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13852Analytical model and Monte Carlo simulations for phosphorus implantation in germanium including ion channelingProceedings paper