Reduction of electrical crosstalk in hybrid backside illuminated CMOS imagers using deep trench isolation

Minoglou, KikiKikiMinoglouDe Munck, KoenKoenDe MunckSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanBorgers, TomTomBorgersRuythooren, WouterWouterRuythoorenBogaerts, JanJanBogaertsFicai Veltroni, IacopoIacopoFicai VeltroniZayer, IgorIgorZayerMeynart, RolandRolandMeynartBezy, Jean-LoupJean-LoupBezyVan Hoof, ChrisChrisVan HoofDe Moor, PietPietDe Moor2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14171Reduction of electrical crosstalk in hybrid backside illuminated CMOS imagers using deep trench isolationProceedings paper