Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

Marinov, DaniilDaniilMarinovEl Otell, ZiadZiadEl OtellBowden, MarkMarkBowdenBraithwaite, NicholasNicholasBraithwaite2021-10-222021-10-2220150963-0252https://imec-publications.be/handle/20.500.12860/25618Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasmaJournal articlehttp://iopscience.iop.org/article/10.1088/0963-0252/24/6/065008