Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering

BenMoussa, B.B.BenMoussaD'Haen, JanJanD'HaenBorschel, C.C.BorschelGoris, L.L.GorisSoltani, A.A.SoltaniMortet, VincentVincentMortetRonning, C.C.RonningD'Olieslaeger, MarcMarcD'OlieslaegerBoyen, H.G.H.G.BoyenHaenen, KenKenHaenen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16735Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputteringOral presentation