Gupta, AnshulAnshulGuptaVarela Pedreira, OlallaOlallaVarela PedreiraTao, ZhengZhengTaoMertens, HansHansMertensRadisic, DunjaDunjaRadisicJourdan, NicolasNicolasJourdanDevriendt, KatiaKatiaDevriendtHeylen, NancyNancyHeylenWang, ShouhuaShouhuaWangChehab, BilalBilalChehabJang, DoyoungDoyoungJangHellings, GeertGeertHellingsSebaai, FaridFaridSebaaiLorant, ChristopheChristopheLorantTeugels, LieveLieveTeugelsPeter, AntonyAntonyPeterChan, BTBTChanSchleicher, FilipFilipSchleicherDemonie, IngridIngridDemonieMarien, PhilippePhilippeMarienSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezRichard, OlivierOlivierRichardNagesh, NishanthNishanthNageshLesniewska, AlicjaAlicjaLesniewskaLazzarino, FredericFredericLazzarinoRyckaert, JulienJulienRyckaertMorin, PierrePierreMorinAltamirano Sanchez, EfrainEfrainAltamirano SanchezMurdoch, GayleGayleMurdochBoemmels, JuergenJuergenBoemmelsDemuynck, StevenStevenDemuynckNa, Myung HeeMyung HeeNaTokei, ZsoltZsoltTokeiBiesemans, SergeSergeBiesemansDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2021-12-162021-12-062021-12-1620202380-9248WOS:000717011600081https://imec-publications.be/handle/20.500.12860/38537Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and BeyondProceedings paper10.1109/IEDM13553.2020.9371970978-1-7281-8888-1WOS:000717011600081