Soethoudt, JobJobSoethoudtTomczak, YoannYoannTomczakGrillo, FabioFabioGrilloVan Ommen, RuudRuudVan OmmenAltamirano Sanchez, EfrainEfrainAltamirano SanchezDelabie, AnneliesAnneliesDelabie2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31831Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectricsMeeting abstract