Impact of probe penetration on the electrical characterization of Sub-50 nm profiles

Clarysse, TrudoTrudoClarysseVanhaeren, DanielleDanielleVanhaerenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6125Impact of probe penetration on the electrical characterization of Sub-50 nm profilesJournal article