Plasma immersion ion implantation for shallow junctions in silicon

Pinter, IstvanIstvanPinterAbdulhadi, A.A.AbdulhadiMakaro, Z.Z.MakaroKhanh, N.N.KhanhAdam, M.M.AdamBarsony, I.I.BarsonySivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanPoortmans, JefJefPoortmansSong, H.H.SongAdriaenssens, G.G.Adriaenssens2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2867Plasma immersion ion implantation for shallow junctions in siliconOral presentation