Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Bogaerts, WimWimBogaertsDumon, PieterPieterDumonWiaux, VincentVincentWiauxWouters, JanJanWoutersBeckx, StephanStephanBeckxTaillaert, DirkDirkTaillaertLuyssaert, BertBertLuyssaertVan Campenhout, JanJanVan CampenhoutVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7232Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technologyOral presentation