Pacco, AntoineAntoinePaccoAkanishi, YuyaYuyaAkanishiLe, Quoc ToanQuoc ToanLeKesters, ElsElsKestersMurdoch, GayleGayleMurdochHolsteyns, FrankFrankHolsteyns2021-10-272021-10-2720190167-9317https://imec-publications.be/handle/20.500.12860/33717Controlled cobalt recess for advanced interconnect metallizationJournal articlehttps://doi.org/10.1016/j.mee.2019.111131