Bekaert, JoostJoostBekaertLaenens, BartBartLaenensVerhaegen, StafStafVerhaegenVan Look, LieveLieveVan LookTrivkovic, DarkoDarkoTrivkovicLazzarino, FredericFredericLazzarinoVandenberghe, GeertGeertVandenbergheVan Adrichem, PaulPaulVan AdrichemSocha, RobertRobertSochaMulder, M.M.MulderBaron, StanislasStanislasBaronTsai, Min-ChunMin-ChunTsaiNing, KaiKaiNingHsu, StephenStephenHsuBouma, A.A.Boumavan der Heijden, E.E.van der HeijdenSchreel, KoenKoenSchreelCarpaij, R.R.CarpaijDusa, MirceaMirceaDusaZimmerman, JoergJoergZimmermanGraeupner, PaulPaulGraeupnerHennerkes, ChristophChristophHennerkes2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14966Freeform illumination sources: Source mask optimization for 22 nm node SRAMProceedings paper