Formation of dense self-assembled monolayers of (n-decyl)trichlorosilanes on Ta/Ta2O5

De Palma, RandyRandyDe PalmaLaureyn, WimWimLaureynFrederix, FilipFilipFrederixBonroy, KristienKristienBonroyPireaux, J.-J.J.-J.PireauxBorghs, GustaafGustaafBorghsMaes, GuidoGuidoMaes2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11976Formation of dense self-assembled monolayers of (n-decyl)trichlorosilanes on Ta/Ta2O5Journal article