Hellings, GeertGeertHellingsMitard, JeromeJeromeMitardEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerBrunco, DavidDavidBruncoShamiryan, DenisDenisShamiryanVandeweyer, TomTomVandeweyerMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsDe Meyer, KristinKristinDe Meyer2021-10-172021-10-1720090741-3106https://imec-publications.be/handle/20.500.12860/15451High performance 70 nm germanium pMOSFETs with boron LDD implantsJournal articlehttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4717293