ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications

Franquet, AlexisAlexisFranquetConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18930ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applicationsMeeting abstract