Vertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuits

Veloso, AnabelaAnabelaVelosoEneman, GeertGeertEnemanHuynh-Bao, TrongTrongHuynh-BaoVaisman Chasin, AdrianAdrianVaisman ChasinSimoen, EddyEddySimoenVecchio, EmmaEmmaVecchioDevriendt, KatiaKatiaDevriendtBrus, StephanStephanBrusRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooParaschiv, VasileVasileParaschivChan, BTBTChanRadisic, DunjaDunjaRadisicLi, WaikinWaikinLiVersluijs, JankoJankoVersluijsTeugels, LieveLieveTeugelsSebaai, FaridFaridSebaaiFavia, PaolaPaolaFaviaBender, HugoHugoBenderVancoille, EricEricVancoilleScheerder, JeroenJeroenScheerderFleischmann, ClaudiaClaudiaFleischmannHoriguchi, NaotoNaotoHoriguchiMatagne, PhilippePhilippeMatagne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34343Vertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuitsProceedings paper