Highly doped SiGe epitaxy in view of S/D applications

Rengo, GianlucaGianlucaRengoPorret, ClémentClémentPorretHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelPourtois, GeoffreyGeoffreyPourtoisVantomme, AndreAndreVantommeLoo, RogerRogerLoo2021-10-292021-10-292020-09https://imec-publications.be/handle/20.500.12860/35824Highly doped SiGe epitaxy in view of S/D applicationsProceedings paperhttps://iopscience.iop.org/article/10.1149/09805.0027ecst/pdf