Provoost, JanJanProvoostVan Bavel, MiekeMiekeVan BavelWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010-07https://imec-publications.be/handle/20.500.12860/17847Novel MEMS demonstrators show versatility of imec's SiGe MEMS technology platformJournal articlehttp://www.mysemicondaily.com/blog/2010/7/13/imec-demos-versatile-sige-mems-tech-platform.html