Direct plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cells

Carnel, LodewijkLodewijkCarnelGordon, IvanIvanGordonDekkers, HaroldHaroldDekkersVan Gestel, DriesDriesVan GestelVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10187Direct plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cellsProceedings paper