Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulations

Nazir, AftabAftabNazirEyben, PierrePierreEybenClarysse, TrudoTrudoClarysseHellings, GeertGeertHellingsSchulze, AndreasAndreasSchulzeMody, JayJayModyDe Meyer, KristinKristinDe MeyerVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19473Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulationsProceedings paper