Implementation of self-assembly in a 300mm processing environment

Gronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon DelgadilloNealey, PaulPaulNealeyYounkin, ToddToddYounkinMatsunaga, KoichiKoichiMatsunagaSomervell, MarkMarkSomervellNafus, KathleenKathleenNafus2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20756Implementation of self-assembly in a 300mm processing environmentOral presentation