Zanaty, MohamedMohamedZanatyJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusAbbas, M.M.AbbasWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23430Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonatorsProceedings paper