Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersMertens, RobertRobertMertensDeborgies, F.F.DeborgiesMarchand, L.L.MarchandDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8093RF-MEMS metal contact capacitive switchesProceedings paper